RF-MEMS load sensors with enhanced Q-factor and sensitivity in a suspended architecture
نویسندگان
چکیده
منابع مشابه
RF-MEMS Load Sensors with Enhanced Q-factor and Sensitivity in a Suspended Architecture.
In this paper, we present and demonstrate RF-MEMS load sensors designed and fabricated in a suspended architecture that increases their quality-factor (Q-factor), accompanied with an increased resonance frequency shift under load. The suspended architecture is obtained by removing silicon under the sensor. We compare two sensors that consist of 195 μm × 195 μm resonators, where all of the reson...
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ژورنال
عنوان ژورنال: Microelectronic Engineering
سال: 2011
ISSN: 0167-9317
DOI: 10.1016/j.mee.2010.10.041